The 2025 edition of Future Tech Week (FTW) is taking place from April 7th to 11th, 2025

FTW 2025 will once again bring together innovators, researchers, and key stakeholders for a week dedicated to collaboration, knowledge-sharing, and networking. Designed as a platform for deep-tech projects, this event provides an opportunity to showcase achievements, foster meaningful connections, and stimulate synergies among EIC-funded projects, external experts, and the broader research and innovation community.

As part of FTW 2025, OXiNEMS is hosting two webinar presentations:

Luca Pellegrino “Magnetometer for Biomagnetism”, Online April 8th, 14:30 – 15:00 [event registration link]

Nicola Manca “Functional Oxides-Based MEMS”, Online April 11th, 14:30 – 15:00 [event registration link]

Join us to be part of these events!

Nicola Manca was awarded with “The Oxide Electronics Prize for Excellence in Research” for “his groundbreaking research on microelectromechanical devices with epitaxial oxides”.

The prize was given at the 30th International workshop on Oxide Electronics (iWOE30) held in Darmstadt (Germany) from 29 September to 2 October 2024.

Many congratulations to Nicola!

This year the results of the OXiNEMS project have been presented at the 30th International workshop on Oxide Electronics (iWOE30) held in Darmstadt (Germany) from 29 September to 2 October 2024.

Here the list of our presentations:

• "Bulk micro-machining of SrTiO3 substrates for device applications" (Poster by Nicola Manca)
• "Strain, Young’s modulus, and structural transition of EuTiO3 thin films probed by micro-mechanical methods" (Poster by Daniele Marré)
• "(La0.7,Sr0.3)MnO3 trampoline resonators for magnetometers and IR bolometers" (Poster by Luca Pellegrino)
• …and one oral contribution “Integration of High-Tc Superconductors and High Q-factor Mechanical Resonators in LaAlO₃ Suspended Micro-Bridges” given by Nicola Manca

Our article “Integration of High-Tc Superconductors with High-Q-Factor Oxide Mechanical Resonators” has been accepted for publication on Advanced Functional Materials."

We realized a micro-mechanical resonator showing both high mechanical Q-factor and superconductivity at 77 K. This result was achieved by integrating a high-Tc superconductor YBa2Cu3O7 (YBCO) with a high Q-factor micro-bridge resonators made of single-crystal LaAlO3 (LAO) thin films. Bare LAO resonators are tensile strained, with a stress of about 350 MPa, and show a mechanical Q-factor above 200k at room temperature. Additionally, they have low surface roughness. A YBCO film was then grown ex-situ by pulse laser deposition on top of the suspended bridges. Final devices show zero resistance below 78 K and mechanical properties similar to those of bare LAO ones. These results open new possibilities towards the development of advanced transducers, such as bolometers or magnetic field detectors, as well as experiments in solid state physics, material science, and quantum opto-mechanics.

For further readings:

N. Manca, A. Kalaboukhov, A. E. Plaza, L. Cichetto Jr., E. Wahlberg, E. Bellingeri, F. Bisio, F. Lombardi, D. Marré, L. Pellegrino, “Integration of High-Tc Superconductors with High-Q-Factor Oxide Mechanical Resonators” Adv. Funct. Mater. 2024, 2403155.