Our article "Magnetic Trampoline Resonators Made of (La,Sr)MnO3 Single-Crystal Thin Films" has been published on ACS Sensors!
|  | Abstract: Microelectro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different approach relying on (La0.7,Sr0.3)MnO3 (LSMO), an oxide compound that works both as a structural element for the resonator and a functional magnetic layer. Suspended trampolines are realized in a single-step process from LSMO thin films and show a quality factor of up to 60k and f·Q products reaching 1010 Hz. Their magnetic properties are probed by a SQUID magnetometer and magnetic force microscopy, showing a saturation magnetization of 240 kA/m at room temperature and in-plane magnetic domains with a coercivity of 2.5 mT. Being entirely made from a magnetic material, these resonators exhibit a larger magnetic interaction volume compared to other solutions, making them ideal candidates as building blocks for high-sensitivity magnetic field sensors. | 
 
                               
                               This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement N.828784.
 This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement N.828784.