News & events

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News

Published: 11 September 2023

Three talks at conferences by the OXiNEMS members have been done in the last month!

On September 8th Nicola Manca gave an oral contribution entitled "Functional Oxides for Enriched MEMS" at the CMD30-FisMat2023 joint conference in Milan (IT) about recent advancements in oxide nano-mechanics and the OXiNEMS project.

“A Hybrid Superconductor/Nanomechanical Magnetic Field Detector for Biomagnetism” has been presented by Luca Pellegrino at EUCAS23 in Bologna (IT) on September 7th at 10.00 with a contributed talk.

Luca Pellegrino gave an invited talk at ICCGE20 on August 4th in Napoli (IT) with the title “The role of epitaxy in microelectromechanical systems made with transition metal oxide films”.

News

Published: 04 July 2023

Preprint of our article “Strain, Young's modulus, and structural transition of EuTiO3 thin films probed by micro-mechanical methods” by Nicola Manca, Gaia Tarsi, Alexei Kalaboukhov, Francesco Bisio, Federico Caglieris, Floriana Lombardi, Daniele Marré, Luca Pellegrino is now available on ArXiv

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News

Published: 14 June 2023

The OXiNEMS team is now back from Frontiers of Nanomechanical Systems in DELFT. Alexander, Nicola, Enrico and Luca presented the OXiNEMS results at the poster sessions!

News

Published: 14 June 2023

Luca Pellegrino & Nicola Manca enjoyed visiting the Warner Venstra’s laboratory at Quantified Air B.V. in Leiden.

News

Published: 14 June 2023

Our work "Pulsed laser deposition of LaAlO3 films for MEMS applications" has been recently presented by Emilio Bellingeri at the 2023 E-MRS Spring Meeting in Strasbourg at the session Advanced functional films grown by pulsed deposition methods – II

Events

Published: 01 June 2023

The 9^th OXiNEMS project meeting took place on 24-25 May at the Institute of Nanostructure and Solid State Physics (INF) of the University of Hamburg. A great opportunity to discuss in-person the recent advancements of the project and visit the laboratories!

Events

Published: 01 June 2023

Results of the OXiNEMS project will be soon presented at Frontiers of Nanomechanical Systems with 4 posters dealing with oxides, magnetometers and optomechanical systems!

News

Published: 21 May 2023

The kick-off meeting of LSMOMEMS took place in the GREYC lab at ENSICAEN on 15-16 May 2023. This 2-years project of cooperation IEA 2022 between CNRS-GREYC and CNR-SPIN aims developing oxide-based MEMS resonators for infrared detection. The project is coordinated by Dr. Laurence Méchin (CNRS-GREYC, Caen) and Dr. Nicola Manca (CNR-SPIN, Genova).

The objective of LSMOMEMS is to study the principle of operation of infrared bolometers making use of MEMS resonators (i.e. MEMS bolometers) fabricated with epitaxial oxide thin films. The long-term goal of LSMOMEMS is to demonstrate the potential of bolometers made of (La,Sr)MnO3 in relevant technological applications, such as Non Dispersive InfraRed (NDIR) gas sensors, IR spectroscopic sensing or imaging devices.
This project will further develop the technology of complex oxides micromechanics by combining the expertise on micro-fabrication and thermo-mechanical characterization of the two research units. LSMOMEMS will work on two research directions: the development of full-oxide MEMS systems made from epitaxial oxide heterostructures and the integration of complex oxides with silicon MEMS technology. Exchange activities of researchers and students will allow developing a shared framework for performance analysis and fabrication protocols. LSMO-based MEMS are currently under development within the OXiNEMS project.
Nicola Manca had also the opportunity to present the OXiNEMS project to CNRS-GREYC members.