The 9th OXiNEMS project meeting took place on 24-25 May at the Institute of Nanostructure and Solid State Physics (INF) of the University of Hamburg. A great opportunity to discuss in-person the recent advancements of the project and visit the laboratories!
The kick-off meeting of LSMOMEMS took place in the GREYC lab at ENSICAEN on 15-16 May 2023. This 2-years project of cooperation IEA 2022 between CNRS-GREYC and CNR-SPIN aims developing oxide-based MEMS resonators for infrared detection. The project is coordinated by Dr. Laurence Méchin (CNRS-GREYC, Caen) and Dr. Nicola Manca (CNR-SPIN, Genova).
The objective of LSMOMEMS is to study the principle of operation of infrared bolometers making use of MEMS resonators (i.e. MEMS bolometers) fabricated with epitaxial oxide thin films. The long-term goal of LSMOMEMS is to demonstrate the potential of bolometers made of (La,Sr)MnO3 in relevant technological applications, such as Non Dispersive InfraRed (NDIR) gas sensors, IR spectroscopic sensing or imaging devices.
This project will further develop the technology of complex oxides micromechanics by combining the expertise on micro-fabrication and thermo-mechanical characterization of the two research units. LSMOMEMS will work on two research directions: the development of full-oxide MEMS systems made from epitaxial oxide heterostructures and the integration of complex oxides with silicon MEMS technology. Exchange activities of researchers and students will allow developing a shared framework for performance analysis and fabrication protocols. LSMO-based MEMS are currently under development within the OXiNEMS project.
Nicola Manca had also the opportunity to present the OXiNEMS project to CNRS-GREYC members.
Luca Pellegrino gave the talk entitled “Pulsed laser deposition of LaAlO3 films for MEMS applications” at the OPERA workshop "Fundamental research - New Materials”, which took place at Escuela Técnica Superior de Ingenieros de Telecomunicación ETSIT (Higher Technical School of Engineers in Telecommunication) of Universidad Politécnica de Madrid (UPM) from 19 April to 21 April, 2023.
We are present at the Spring Meeting of the German Physical Society 2023 from 26 March to 31 March 2023 in Dresden with three talks and one poster.
Domain structures of stressed free-hanging magnetic thin films
Authors: Dhavalkumar Mungpara*, Alexander Schwarz, Federico Maspero, Riccardo Bertacco, Nicola Manca, Leonèlio Cichetto Jr., Luca Pellegrino
Mon, Mar 27 2023, 15:15-15:30
Interplay between magnetic and electrostatic forces when imaging complex current carrying stripline geometries with Magnetic Force Microscopy
Authors: Denis Goman, Dhavalkumar Mungpara, Alexander Schwarz*
Mon, Mar 27 2023, 16:00-16:15
Towards nanomechanical detection of fT magnetic fields
Authors: Dhavalkumar Mungpara, Torben Hänke, Alexander Schwarz*
Fri, Mar 31 2023, 10:00-10:15
Design and set-up of an optomechanical readout apparatus to characterize magnetic field sensors encompassing high-Q resonators down to 4 K
Authors: Torben Hänke, Dhavalkumar Mungpara, Alexander Schwarz
Thu, Mar 30 2023, 14:00-16:00
A new video demonstrating the mechanism of the frequency shift of a (macroscopic) magnetized cantilever by an external magnetic field has been posted on our Youtube channel and in our “outreach” page. This experiment has been prepared for 20th edition of the Genoa Science Festival for the exhibition “we are all magnetic”, dealing with magnetometers for consumer applications and biomagnetism.
Luca Pellegrino gave the online invited talk on “Oxide MEMS (Micro-Electro-Mechanical-Systems) Devices” at the International Conference on Recent Advances in Science, Technology, Humanities and Management (ICRASTHM-2023)” organized by V. G. Vaze College of Arts, Science & Commerce on 10-11 February 2023. L. P. acknowledges all the organizers of the event.
“Microfabrication of Oxide MEMS on SrTiO3 Substrates: the role of crystal cut” has been presented by Nicola Manca at QUOROM-8 on February 16th 2023. The presented poster is based on our article "The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(100), SrTiO3(110), and SrTiO3(111) substrates".
Gaia Tarsi is PhD student at GREYC since November 2022, she is a Material Scientist and Engineer. Her current interests are semiconductors and microelectronics.
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This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement N.828784.
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