The kick-off meeting of LSMOMEMS took place in the GREYC lab at ENSICAEN on 15-16 May 2023. This 2-years project of cooperation IEA 2022 between CNRS-GREYC and CNR-SPIN aims developing oxide-based MEMS resonators for infrared detection. The project is coordinated by Dr. Laurence Méchin (CNRS-GREYC, Caen) and Dr. Nicola Manca (CNR-SPIN, Genova).

The objective of LSMOMEMS is to study the principle of operation of infrared bolometers making use of MEMS resonators (i.e. MEMS bolometers) fabricated with epitaxial oxide thin films. The long-term goal of LSMOMEMS is to demonstrate the potential of bolometers made of (La,Sr)MnO3 in relevant technological applications, such as Non Dispersive InfraRed (NDIR) gas sensors, IR spectroscopic sensing or imaging devices.
This project will further develop the technology of complex oxides micromechanics by combining the expertise on micro-fabrication and thermo-mechanical characterization of the two research units. LSMOMEMS will work on two research directions: the development of full-oxide MEMS systems made from epitaxial oxide heterostructures and the integration of complex oxides with silicon MEMS technology. Exchange activities of researchers and students will allow developing a shared framework for performance analysis and fabrication protocols. LSMO-based MEMS are currently under development within the OXiNEMS project.
Nicola Manca had also the opportunity to present the OXiNEMS project to CNRS-GREYC members. 

Luca Pellegrino gave the talk entitled “Pulsed laser deposition of LaAlO3 films for MEMS applications” at the OPERA workshop "Fundamental research - New Materials”, which took place at Escuela Técnica Superior de Ingenieros de Telecomunicación ETSIT (Higher Technical School of Engineers in Telecommunication) of Universidad Politécnica de Madrid (UPM) from 19 April to 21 April, 2023.

Download the Workshop program and booklet

The COST Action “European Network for Innovative and Advanced Epitaxy”, named OPERA, will build a new and innovative European Network composed of expert communities in epitaxial growth focusing on different materials classes: conventional semiconductors, oxides and 2D materials. ....More information on OPERA


We are present at the Spring Meeting of the German Physical Society 2023 from 26 March to 31 March 2023 in Dresden with three talks and one poster.


Domain structures of stressed free-hanging magnetic thin films

Authors: Dhavalkumar Mungpara*, Alexander Schwarz, Federico Maspero, Riccardo Bertacco, Nicola Manca, Leonèlio Cichetto Jr., Luca Pellegrino

Mon, Mar 27 2023, 15:15-15:30

Interplay between magnetic and electrostatic forces when imaging complex current carrying stripline geometries with Magnetic Force Microscopy

Authors: Denis Goman, Dhavalkumar Mungpara, Alexander Schwarz*

Mon, Mar 27 2023, 16:00-16:15

Towards nanomechanical detection of fT magnetic fields

Authors: Dhavalkumar Mungpara, Torben Hänke, Alexander Schwarz*

Fri, Mar 31 2023, 10:00-10:15


Design and set-up of an optomechanical readout apparatus to characterize magnetic field sensors encompassing high-Q resonators down to 4 K

Authors: Torben Hänke, Dhavalkumar Mungpara, Alexander Schwarz

Thu, Mar 30 2023, 14:00-16:00

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EU This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement N.828784.
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