The kick-off meeting of LSMOMEMS took place in the GREYC lab at ENSICAEN on 15-16 May 2023. This 2-years project of cooperation IEA 2022 between CNRS-GREYC and CNR-SPIN aims developing oxide-based MEMS resonators for infrared detection. The project is coordinated by Dr. Laurence Méchin (CNRS-GREYC, Caen) and Dr. Nicola Manca (CNR-SPIN, Genova).

The objective of LSMOMEMS is to study the principle of operation of infrared bolometers making use of MEMS resonators (i.e. MEMS bolometers) fabricated with epitaxial oxide thin films. The long-term goal of LSMOMEMS is to demonstrate the potential of bolometers made of (La,Sr)MnO3 in relevant technological applications, such as Non Dispersive InfraRed (NDIR) gas sensors, IR spectroscopic sensing or imaging devices.
This project will further develop the technology of complex oxides micromechanics by combining the expertise on micro-fabrication and thermo-mechanical characterization of the two research units. LSMOMEMS will work on two research directions: the development of full-oxide MEMS systems made from epitaxial oxide heterostructures and the integration of complex oxides with silicon MEMS technology. Exchange activities of researchers and students will allow developing a shared framework for performance analysis and fabrication protocols. LSMO-based MEMS are currently under development within the OXiNEMS project.
Nicola Manca had also the opportunity to present the OXiNEMS project to CNRS-GREYC members. 

We are present at the Spring Meeting of the German Physical Society 2023 from 26 March to 31 March 2023 in Dresden with three talks and one poster.


Domain structures of stressed free-hanging magnetic thin films

Authors: Dhavalkumar Mungpara*, Alexander Schwarz, Federico Maspero, Riccardo Bertacco, Nicola Manca, Leonèlio Cichetto Jr., Luca Pellegrino

Mon, Mar 27 2023, 15:15-15:30

Interplay between magnetic and electrostatic forces when imaging complex current carrying stripline geometries with Magnetic Force Microscopy

Authors: Denis Goman, Dhavalkumar Mungpara, Alexander Schwarz*

Mon, Mar 27 2023, 16:00-16:15

Towards nanomechanical detection of fT magnetic fields

Authors: Dhavalkumar Mungpara, Torben Hänke, Alexander Schwarz*

Fri, Mar 31 2023, 10:00-10:15


Design and set-up of an optomechanical readout apparatus to characterize magnetic field sensors encompassing high-Q resonators down to 4 K

Authors: Torben Hänke, Dhavalkumar Mungpara, Alexander Schwarz

Thu, Mar 30 2023, 14:00-16:00

Interview with Gaia Tarsi: “If you like science, give it a try!”

 Gaia Tarsi is PhD student at GREYC since November 2022, she is a Material Scientist and Engineer. Her current interests are semiconductors and microelectronics.

In the marvelous frame of the Italian Pavilion at Expo2020 in Dubai, on February 28th  and March 1st has been held the final phase of the Intellectual Property Award (IPA) 2021 competition, promoted by the Italian Patent and Trademark Office of the Ministry of Economic Development in collaboration with Netval (the Italian Network for the Valorization of the Public Research). An award dedicated to the excellence of Italian public research, characterized by expertise, competence and dynamism.

IPA 2021 has received a great response, with 217 patents submitted in the seven technological areas: 1- Agritech and Agrifood, 2- Cybersecurity, Artificial Intelligence and Big Data, 3- Green Technologies and Alternative Materials, 4- Life Science and Health Care, 5- Aerospace, 6- Renewable Sources, Alternative Energy and Water, 7- Future Mobility.

The OXiNEMS patent Low-power magnetometer for improved sensors integration in future vehicles has passed the severe selection by a panel of national experts and get access to the 35 finalists (5 per category) presented at Expo2020 Dubai.

Federico Maspero, team delegate of OXiNEMS, presented at IPA 2021 ceremony in the “Future Mobility” category the conceived MEMS magnetometer to ease the integration between magnetic sensors and inertial sensors, offering both high performance (e.g., sensors alignment), with low power consumption and possibility of integration into existing processes. At the ceremony was present also Silvia Cella as CNR - TTOffice representative. The IPA2021 prize in the Future Mobility category was won by the University of Bologna with the patent “Self-confident: online learning for detecting depth sensor failures”, a solution to increase the safety and efficacy of autonomous driving systems.

Notwithstanding, congratulation to Federico and all the OXiNEMS team working on this technology that led to the Italian patent application No. 102020000007969 and the International patent application No. WO2021209891 A1.



The OXiNEMS project will be present at the 18th International Workshop on Nanomechanical sensing, this year held at the Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science(IISc), Bangalore, India from 9th - 12th August 2022 (Hybrid Mode).

Nicola Manca will present a Poster on “Stress Analysis and Q-Factor of Free-Standing (La,Sr)MnO3 Oxide Resonators” and Dhavalkumar Mungpara will give the talk “Towards nanomechanical detection of tiny magnetic fields”. The program of the event is reported on the NMC2022 website.

Illustration: Yen Strandqvist

The paper “Restored strange metal phase through suppression of charge density waves in underdoped YBa2Cu3O7–δ” from the Chalmers University of Technology group is now available in Science Magazine. The research has been led by the Chalmers group, in collaboration with researchers from Politecnico di Milano, University La Sapienza, Brandenburg University of Technology and the European Synchrotron facility (ESRF). Congratulations to the Teams!

The presented research focuses on understanding and controlling the enigmatic state called ‘strange metal’, appearing in high temperature superconductors at temperatures above the superconducting transition.

The main result of the paper is new evidence of an intimate connection between the strange metal state and a “directional” local charge modulation in the conducting electrons called charge density waves (CDW). More specifically, the strange metal state is suppressed by the appearance of these charge modulations, providing valuable insights into the possible mechanism behind this enigmatic state. The experiment also shows that CDW can be controlled by applying strain to the material, leading to a novel technique of using strain to turn the strange metal state on or off. This is the first step towards a systematic study of ultra quantum matter in the lab, where strain control can be used to manipulate this new class of quantum materials.

Oxide nanoelectromechanical systems can be a potential tool to reversibly control strain and thus manipulate the ground state such (oxide) quantum materials.

Read more about our paper here.

Open Version


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