Luca Pellegrino & Nicola Manca enjoyed visiting the Warner Venstra’s laboratory at Quantified Air B.V. in Leiden.

The kick-off meeting of LSMOMEMS took place in the GREYC lab at ENSICAEN on 15-16 May 2023. This 2-years project of cooperation IEA 2022 between CNRS-GREYC and CNR-SPIN aims developing oxide-based MEMS resonators for infrared detection. The project is coordinated by Dr. Laurence Méchin (CNRS-GREYC, Caen) and Dr. Nicola Manca (CNR-SPIN, Genova).

The objective of LSMOMEMS is to study the principle of operation of infrared bolometers making use of MEMS resonators (i.e. MEMS bolometers) fabricated with epitaxial oxide thin films. The long-term goal of LSMOMEMS is to demonstrate the potential of bolometers made of (La,Sr)MnO3 in relevant technological applications, such as Non Dispersive InfraRed (NDIR) gas sensors, IR spectroscopic sensing or imaging devices.
This project will further develop the technology of complex oxides micromechanics by combining the expertise on micro-fabrication and thermo-mechanical characterization of the two research units. LSMOMEMS will work on two research directions: the development of full-oxide MEMS systems made from epitaxial oxide heterostructures and the integration of complex oxides with silicon MEMS technology. Exchange activities of researchers and students will allow developing a shared framework for performance analysis and fabrication protocols. LSMO-based MEMS are currently under development within the OXiNEMS project.
Nicola Manca had also the opportunity to present the OXiNEMS project to CNRS-GREYC members. 

We are present at the Spring Meeting of the German Physical Society 2023 from 26 March to 31 March 2023 in Dresden with three talks and one poster.


Domain structures of stressed free-hanging magnetic thin films

Authors: Dhavalkumar Mungpara*, Alexander Schwarz, Federico Maspero, Riccardo Bertacco, Nicola Manca, Leonèlio Cichetto Jr., Luca Pellegrino

Mon, Mar 27 2023, 15:15-15:30

Interplay between magnetic and electrostatic forces when imaging complex current carrying stripline geometries with Magnetic Force Microscopy

Authors: Denis Goman, Dhavalkumar Mungpara, Alexander Schwarz*

Mon, Mar 27 2023, 16:00-16:15

Towards nanomechanical detection of fT magnetic fields

Authors: Dhavalkumar Mungpara, Torben Hänke, Alexander Schwarz*

Fri, Mar 31 2023, 10:00-10:15


Design and set-up of an optomechanical readout apparatus to characterize magnetic field sensors encompassing high-Q resonators down to 4 K

Authors: Torben Hänke, Dhavalkumar Mungpara, Alexander Schwarz

Thu, Mar 30 2023, 14:00-16:00

Interview with Gaia Tarsi: “If you like science, give it a try!”

 Gaia Tarsi is PhD student at GREYC since November 2022, she is a Material Scientist and Engineer. Her current interests are semiconductors and microelectronics.

The OXiNEMS project will be present at the 18th International Workshop on Nanomechanical sensing, this year held at the Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science(IISc), Bangalore, India from 9th - 12th August 2022 (Hybrid Mode).

Nicola Manca will present a Poster on “Stress Analysis and Q-Factor of Free-Standing (La,Sr)MnO3 Oxide Resonators” and Dhavalkumar Mungpara will give the talk “Towards nanomechanical detection of tiny magnetic fields”. The program of the event is reported on the NMC2022 website.

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