OXiNEMS - Oxide Nanoelectromechanical Systems for Ultrasensitive and Robust Sensing of Biomagnetic Fields - targets the development of nanoelectromechanical systems (NEMS) devices fully made of (crystalline) transition metal oxides, a class of compounds that show a wide range of physical properties, with the perspective of introducing new classes of transducers with unprecedented detection/transduction mechanisms and integrating more functionalities into nanomechanical systems. This new technological approach will add multifunctional oxides to the repertoire of the current MEMS/NEMS field.
Starting date May 1st 2019 – End date January 31st 2024 – Total budget 3,176,802.50 Eur